SEMICONDUCTOR DEVICE BONDING WIRE
To provide a novel Cu bonding wire that achieves a favorable FAB shape and a favorable bondability of the 2nd bonded part, and further achieves favorable bond reliability of the 1st bonded part in a high-temperature environment. The bonding wire for semiconductor devices includes: a core material of...
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creator | HAIBARA, Teruo OISHI, Ryo ETO, Motoki YAMADA, Takashi ODA, Daizo |
description | To provide a novel Cu bonding wire that achieves a favorable FAB shape and a favorable bondability of the 2nd bonded part, and further achieves favorable bond reliability of the 1st bonded part in a high-temperature environment. The bonding wire for semiconductor devices includes: a core material of Cu or Cu alloy; and a coating layer containing conductive metal other than Cu formed on a surface of the core material, wherein the coating layer has a region containing Ni as a main component on a core material side, and has a region containing Au and Ni on a wire surface side, in a thickness direction of the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, a ratio CAu/CNi of a concentration CAu (mass%) of Au to a concentration CNi (mass%) of Ni relative to the entire wire is 0.02 or more and 0.7 or less, and a concentration of Au at the surface of the wire is 10 atomic% or more and 90 atomic% or less |
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The bonding wire for semiconductor devices includes: a core material of Cu or Cu alloy; and a coating layer containing conductive metal other than Cu formed on a surface of the core material, wherein the coating layer has a region containing Ni as a main component on a core material side, and has a region containing Au and Ni on a wire surface side, in a thickness direction of the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, a ratio CAu/CNi of a concentration CAu (mass%) of Au to a concentration CNi (mass%) of Ni relative to the entire wire is 0.02 or more and 0.7 or less, and a concentration of Au at the surface of the wire is 10 atomic% or more and 90 atomic% or less</description><language>eng ; fre ; ger</language><subject>ALLOYS ; BASIC ELECTRIC ELEMENTS ; CHEMISTRY ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FERROUS OR NON-FERROUS ALLOYS ; METALLURGY ; SEMICONDUCTOR DEVICES ; TREATMENT OF ALLOYS OR NON-FERROUS METALS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240501&DB=EPODOC&CC=EP&NR=4361300A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240501&DB=EPODOC&CC=EP&NR=4361300A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HAIBARA, Teruo</creatorcontrib><creatorcontrib>OISHI, Ryo</creatorcontrib><creatorcontrib>ETO, Motoki</creatorcontrib><creatorcontrib>YAMADA, Takashi</creatorcontrib><creatorcontrib>ODA, Daizo</creatorcontrib><title>SEMICONDUCTOR DEVICE BONDING WIRE</title><description>To provide a novel Cu bonding wire that achieves a favorable FAB shape and a favorable bondability of the 2nd bonded part, and further achieves favorable bond reliability of the 1st bonded part in a high-temperature environment. The bonding wire for semiconductor devices includes: a core material of Cu or Cu alloy; and a coating layer containing conductive metal other than Cu formed on a surface of the core material, wherein the coating layer has a region containing Ni as a main component on a core material side, and has a region containing Au and Ni on a wire surface side, in a thickness direction of the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, a ratio CAu/CNi of a concentration CAu (mass%) of Au to a concentration CNi (mass%) of Ni relative to the entire wire is 0.02 or more and 0.7 or less, and a concentration of Au at the surface of the wire is 10 atomic% or more and 90 atomic% or less</description><subject>ALLOYS</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMISTRY</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>FERROUS OR NON-FERROUS ALLOYS</subject><subject>METALLURGY</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TREATMENT OF ALLOYS OR NON-FERROUS METALS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAMdvX1dPb3cwl1DvEPUnBxDfN0dlVwAgp4-rkrhHsGufIwsKYl5hSn8kJpbgYFN9cQZw_d1IL8-NTigsTk1LzUknjXABNjM0NjAwNHQ2MilAAA2TIhuQ</recordid><startdate>20240501</startdate><enddate>20240501</enddate><creator>HAIBARA, Teruo</creator><creator>OISHI, Ryo</creator><creator>ETO, Motoki</creator><creator>YAMADA, Takashi</creator><creator>ODA, Daizo</creator><scope>EVB</scope></search><sort><creationdate>20240501</creationdate><title>SEMICONDUCTOR DEVICE BONDING WIRE</title><author>HAIBARA, Teruo ; OISHI, Ryo ; ETO, Motoki ; YAMADA, Takashi ; ODA, Daizo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP4361300A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2024</creationdate><topic>ALLOYS</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMISTRY</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>FERROUS OR NON-FERROUS ALLOYS</topic><topic>METALLURGY</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TREATMENT OF ALLOYS OR NON-FERROUS METALS</topic><toplevel>online_resources</toplevel><creatorcontrib>HAIBARA, Teruo</creatorcontrib><creatorcontrib>OISHI, Ryo</creatorcontrib><creatorcontrib>ETO, Motoki</creatorcontrib><creatorcontrib>YAMADA, Takashi</creatorcontrib><creatorcontrib>ODA, Daizo</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HAIBARA, Teruo</au><au>OISHI, Ryo</au><au>ETO, Motoki</au><au>YAMADA, Takashi</au><au>ODA, Daizo</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SEMICONDUCTOR DEVICE BONDING WIRE</title><date>2024-05-01</date><risdate>2024</risdate><abstract>To provide a novel Cu bonding wire that achieves a favorable FAB shape and a favorable bondability of the 2nd bonded part, and further achieves favorable bond reliability of the 1st bonded part in a high-temperature environment. The bonding wire for semiconductor devices includes: a core material of Cu or Cu alloy; and a coating layer containing conductive metal other than Cu formed on a surface of the core material, wherein the coating layer has a region containing Ni as a main component on a core material side, and has a region containing Au and Ni on a wire surface side, in a thickness direction of the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, a ratio CAu/CNi of a concentration CAu (mass%) of Au to a concentration CNi (mass%) of Ni relative to the entire wire is 0.02 or more and 0.7 or less, and a concentration of Au at the surface of the wire is 10 atomic% or more and 90 atomic% or less</abstract><oa>free_for_read</oa></addata></record> |
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language | eng ; fre ; ger |
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subjects | ALLOYS BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FERROUS OR NON-FERROUS ALLOYS METALLURGY SEMICONDUCTOR DEVICES TREATMENT OF ALLOYS OR NON-FERROUS METALS |
title | SEMICONDUCTOR DEVICE BONDING WIRE |
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