COMPACT VIBRATION SENSOR

The present invention relates to a vibration sensor comprising a carrier substrate comprising a first surface and a second surface, a suspension member and a moveable mass secured thereto, wherein the moveable mass and/or at least part of the suspension member is/are adapted to vibrate when the vibr...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	LAFORT, Adrianus, Maria
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING PHYSICS TESTING
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