METHOD FOR MANUFACTURING A COMPOSITE STRUCTURE COMPRISING A THIN SINGLE-CRYSTAL SEMICONDUCTOR LAYER ON A CARRIER SUBSTRATE

A method of manufacturing a composite structure comprises: a) providing a donor substrate of a single-crystal semiconductor material, b) implanting ions into the donor substrate, excluding an annular peripheral region, to form a buried brittle plane, the implantation conditions defining a first ther...

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Bibliographische Detailangaben
Hauptverfasser: LANDRU, Didier, BIARD, Hugo
Format: Patent
Sprache:eng ; fre ; ger
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