MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK

Systems and methods of enhancing imaging resolution by reducing crosstalk between detection elements of a secondary charged-particle detector in a multi-beam apparatus are disclosed. The multi-beam apparatus may comprise an electro-optical system comprising a beam-limit aperture plate having a surfa...

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Bibliographische Detailangaben

Hauptverfasser:	GU, Shichen, REN, Weiming, XI, Qingpo
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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