INTEGRATED CIRCUIT SEMICONDUCTOR DEVICE

An Integrated Circuit (IC) semiconductor device includes: field insulating layers buried in field trenches disposed apart from each other inside a substrate; active regions defined by the field insulating layers; and active fins disposed on the active regions and protruding from surfaces of the fiel...

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Bibliographische Detailangaben
Hauptverfasser: CHAE, Heejae, KIM, Bongsoo, PARK, Chulkwon, YOON, Gyunghyun, PARK, Taejin, KIM, Huijung, KIM, Kyujin
Format: Patent
Sprache:eng ; fre ; ger
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