INGOT PULLER APPARATUS HAVING A COMPOUND EXHAUST TUBE AND METHODS FOR SELECTING THE LENGTHS OF LOWER AND UPPER EXHAUST TUBE PORTIONS

Ingot puller apparatus having a compound exhaust tube and methods for selecting the length of the lower and upper portions of the compound exhaust tube are disclosed. In some embodiments, the upper portion of the compound exhaust tube is made of graphite and the lower portion is made of stainless st...

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Bibliographische Detailangaben
Hauptverfasser: MEYER, Benjamin Michael, RYU, JaeWoo, JI, JunHwan, HUDSON, Carissima Marie, YUN, WooJin
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Ingot puller apparatus having a compound exhaust tube and methods for selecting the length of the lower and upper portions of the compound exhaust tube are disclosed. In some embodiments, the upper portion of the compound exhaust tube is made of graphite and the lower portion is made of stainless steel.