MICROELECTOMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

A microelectromechanical element that patterned regions of wafer material and glass material. The regions of glass material include at least a first glass region and a second glass region formed of a first glass material and a second glass material respectively. The first glass material enables anod...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OKSANEN, Jussi, LAHDENPERÄ, Juha, TORKKELI, Altti, HÄRKÖNEN, Aarni
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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