MICROELECTOMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

MICROELECTOMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

A microelectromechanical element that patterned regions of wafer material and glass material. The regions of glass material include at least a first glass region and a second glass region formed of a first glass material and a second glass material respectively. The first glass material enables anod...

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Hauptverfasser: OKSANEN, Jussi, LAHDENPERÄ, Juha, TORKKELI, Altti, HÄRKÖNEN, Aarni
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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creator OKSANEN, Jussi
LAHDENPERÄ, Juha
TORKKELI, Altti
HÄRKÖNEN, Aarni
description A microelectromechanical element that patterned regions of wafer material and glass material. The regions of glass material include at least a first glass region and a second glass region formed of a first glass material and a second glass material respectively. The first glass material enables anodic bonding with the wafer material, and the alkali metal content of the second glass material is less than the alkali metal content of the first glass material.
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subjects MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
title MICROELECTOMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
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