RF POWER DELIVERY ARCHITECTURE WITH SWITCHABLE MATCH AND FREQUENCY TUNING

A power supply circuit includes a switchable match, including a high voltage bus connectable to a load, a low voltage bus connectable to the load such that the load is in series between the high voltage bus and the low voltage bus, at least two capacitors having a fixed value of capacitance selectiv...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAMMOND, IV, Edward P, TRACHUK, Yury, DZILNO, Dmitry A
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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