METHOD FOR GENERATING A RF SIGNAL; RF GENERATOR AND PLASMA APPARATUS

A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF signal; synchronizing the at least one distorted RF signal with the input RF signal; deter...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GREDE, André, SCHWERG, Nikolai, LABANC, Anton, VOR DEM BROCKE, Manuel, SCHLIERF, Roland, GRUNER, Daniel
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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