MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE AND NOISE CANCELLATION METHOD

There is provided a micro-electromechanical system (MEMS) device (102, 200, 300, 404) for cancelling noise generated by oscillation of a movable micro-electromechanical system (MEMS) element (104, 204, 304, 406). The micro-electromechanical system (MEMS) device (102, 200, 300, 404) includes the mova...

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Bibliographische Detailangaben
Hauptverfasser:	JANICKE, Christian, KNIELING, Thomas, HOFMANN, Ulrich, POHL, Leon, SENGER, Frank, WANTOCH, Thomas, Von, MARAUSKA, Stephan, ALBERS, Jörg
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ACOUSTICS ACOUSTICS NOT OTHERWISE PROVIDED FOR CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY MUSICAL INSTRUMENTS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOUND-PRODUCING DEVICES TRANSPORTING
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