WORKPIECE CONVEYANCE DEVICE
This workpiece conveyance device (1) comprises: a plurality of holding heads (2) having a holding section for holding a workpiece (W) and a vacuum pump (22) for generating holding force; and a conveyance track (4) for conveying the plurality of holding heads (2). The vacuum pump (22) has a pump sect...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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