PIEZOELECTRIC DEVICE
A piezoelectric device includes a substrate (10) on which a plurality of recesses (12) are arranged in a first direction, a vibration plate (50), and a piezoelectric actuator (300) having a first electrode (61), a second electrode (62) and a third electrode (63), a fourth electrode (80), and a piezo...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A piezoelectric device includes a substrate (10) on which a plurality of recesses (12) are arranged in a first direction, a vibration plate (50), and a piezoelectric actuator (300) having a first electrode (61), a second electrode (62) and a third electrode (63), a fourth electrode (80), and a piezoelectric layer (70), in which a plurality of active portions (311, 312, 313) are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, and the fourth electrode configures a common electrode for the plurality of active portions. |
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