SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE
A radiation source contains a collector module comprising an optical collector, positioned in a vacuum chamber with an emitting plasma, further comprising a means for debris mitigation which include at least two casings arranged to output debris-free homocentric beams of the short-wavelength radiati...
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| creator | GLUSHKOV, Denis Aleksandrovich SIDELNIKOV, Yury Viktorovich KHRISTOFOROV, Oleg Borisovich MEDVEDEV, Vyacheslav Valerievich YAKUSHEV, Oleg Feliksovich VINOKHODOV, Aleksandr Yurievich IVANOV, Vladimir Vitalievich LASH, Aleksandr Andreevich KRIVOKORYTOV, Mikhail Sergeyevich ELLWI, Samir KOSHELEV, Konstantin Nikolaevich KRIVTSUN, Vladimir Mikhailovich |
| description | A radiation source contains a collector module comprising an optical collector, positioned in a vacuum chamber with an emitting plasma, further comprising a means for debris mitigation which include at least two casings arranged to output debris-free homocentric beams of the short-wavelength radiation, coming to the optical collector preferably consisting of several identical mirrors. Outside each casing there are permanent magnets that create a magnetic field inside the casings to mitigate charged fraction of debris particles and provide the debris-free homocentric beams of short-wavelength radiation. Other debris mitigating techniques are additionally used. Preferably the plasma is laser-produced plasma of a liquid metal target supplied by a rotating target assembly to a focus area of a laser beam. The technical result of the invention is the creation of high-powerful high-brightness debris-free sources of short-wavelength radiation with large, preferably more than 0.25 sr, collection solid angle. |
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Outside each casing there are permanent magnets that create a magnetic field inside the casings to mitigate charged fraction of debris particles and provide the debris-free homocentric beams of short-wavelength radiation. Other debris mitigating techniques are additionally used. Preferably the plasma is laser-produced plasma of a liquid metal target supplied by a rotating target assembly to a focus area of a laser beam. The technical result of the invention is the creation of high-powerful high-brightness debris-free sources of short-wavelength radiation with large, preferably more than 0.25 sr, collection solid angle.</description><language>eng ; fre ; ger</language><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; X-RAY TECHNIQUE</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230712&DB=EPODOC&CC=EP&NR=4209120A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230712&DB=EPODOC&CC=EP&NR=4209120A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GLUSHKOV, Denis Aleksandrovich</creatorcontrib><creatorcontrib>SIDELNIKOV, Yury Viktorovich</creatorcontrib><creatorcontrib>KHRISTOFOROV, Oleg Borisovich</creatorcontrib><creatorcontrib>MEDVEDEV, Vyacheslav Valerievich</creatorcontrib><creatorcontrib>YAKUSHEV, Oleg Feliksovich</creatorcontrib><creatorcontrib>VINOKHODOV, Aleksandr Yurievich</creatorcontrib><creatorcontrib>IVANOV, Vladimir Vitalievich</creatorcontrib><creatorcontrib>LASH, Aleksandr Andreevich</creatorcontrib><creatorcontrib>KRIVOKORYTOV, Mikhail Sergeyevich</creatorcontrib><creatorcontrib>ELLWI, Samir</creatorcontrib><creatorcontrib>KOSHELEV, Konstantin Nikolaevich</creatorcontrib><creatorcontrib>KRIVTSUN, Vladimir Mikhailovich</creatorcontrib><title>SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE</title><description>A radiation source contains a collector module comprising an optical collector, positioned in a vacuum chamber with an emitting plasma, further comprising a means for debris mitigation which include at least two casings arranged to output debris-free homocentric beams of the short-wavelength radiation, coming to the optical collector preferably consisting of several identical mirrors. Outside each casing there are permanent magnets that create a magnetic field inside the casings to mitigate charged fraction of debris particles and provide the debris-free homocentric beams of short-wavelength radiation. Other debris mitigating techniques are additionally used. Preferably the plasma is laser-produced plasma of a liquid metal target supplied by a rotating target assembly to a focus area of a laser beam. The technical result of the invention is the creation of high-powerful high-brightness debris-free sources of short-wavelength radiation with large, preferably more than 0.25 sr, collection solid angle.</description><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>X-RAY TECHNIQUE</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAP9vAPCtFVCHcMc_Vx9XMP8VAIcnTxdAzx9PdTCPYPDXJ2VQj3BIr6hvqEeAa7OoMkHH0UnP19fIAc_yAFX3-XUB9XHgbWtMSc4lReKM3NoODmGuLsoZtakB-fWlyQmJyal1oS7xpgYmRgaWhk4GhoTIQSALeeLI4</recordid><startdate>20230712</startdate><enddate>20230712</enddate><creator>GLUSHKOV, Denis Aleksandrovich</creator><creator>SIDELNIKOV, Yury Viktorovich</creator><creator>KHRISTOFOROV, Oleg Borisovich</creator><creator>MEDVEDEV, Vyacheslav Valerievich</creator><creator>YAKUSHEV, Oleg Feliksovich</creator><creator>VINOKHODOV, Aleksandr Yurievich</creator><creator>IVANOV, Vladimir Vitalievich</creator><creator>LASH, Aleksandr Andreevich</creator><creator>KRIVOKORYTOV, Mikhail Sergeyevich</creator><creator>ELLWI, Samir</creator><creator>KOSHELEV, Konstantin Nikolaevich</creator><creator>KRIVTSUN, Vladimir Mikhailovich</creator><scope>EVB</scope></search><sort><creationdate>20230712</creationdate><title>SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE</title><author>GLUSHKOV, Denis Aleksandrovich ; SIDELNIKOV, Yury Viktorovich ; KHRISTOFOROV, Oleg Borisovich ; MEDVEDEV, Vyacheslav Valerievich ; YAKUSHEV, Oleg Feliksovich ; VINOKHODOV, Aleksandr Yurievich ; IVANOV, Vladimir Vitalievich ; LASH, Aleksandr Andreevich ; KRIVOKORYTOV, Mikhail Sergeyevich ; ELLWI, Samir ; KOSHELEV, Konstantin Nikolaevich ; KRIVTSUN, Vladimir Mikhailovich</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP4209120A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2023</creationdate><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>X-RAY TECHNIQUE</topic><toplevel>online_resources</toplevel><creatorcontrib>GLUSHKOV, Denis Aleksandrovich</creatorcontrib><creatorcontrib>SIDELNIKOV, Yury Viktorovich</creatorcontrib><creatorcontrib>KHRISTOFOROV, Oleg Borisovich</creatorcontrib><creatorcontrib>MEDVEDEV, Vyacheslav Valerievich</creatorcontrib><creatorcontrib>YAKUSHEV, Oleg Feliksovich</creatorcontrib><creatorcontrib>VINOKHODOV, Aleksandr Yurievich</creatorcontrib><creatorcontrib>IVANOV, Vladimir Vitalievich</creatorcontrib><creatorcontrib>LASH, Aleksandr Andreevich</creatorcontrib><creatorcontrib>KRIVOKORYTOV, Mikhail Sergeyevich</creatorcontrib><creatorcontrib>ELLWI, Samir</creatorcontrib><creatorcontrib>KOSHELEV, Konstantin Nikolaevich</creatorcontrib><creatorcontrib>KRIVTSUN, Vladimir Mikhailovich</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>GLUSHKOV, Denis Aleksandrovich</au><au>SIDELNIKOV, Yury Viktorovich</au><au>KHRISTOFOROV, Oleg Borisovich</au><au>MEDVEDEV, Vyacheslav Valerievich</au><au>YAKUSHEV, Oleg Feliksovich</au><au>VINOKHODOV, Aleksandr Yurievich</au><au>IVANOV, Vladimir Vitalievich</au><au>LASH, Aleksandr Andreevich</au><au>KRIVOKORYTOV, Mikhail Sergeyevich</au><au>ELLWI, Samir</au><au>KOSHELEV, Konstantin Nikolaevich</au><au>KRIVTSUN, Vladimir Mikhailovich</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE</title><date>2023-07-12</date><risdate>2023</risdate><abstract>A radiation source contains a collector module comprising an optical collector, positioned in a vacuum chamber with an emitting plasma, further comprising a means for debris mitigation which include at least two casings arranged to output debris-free homocentric beams of the short-wavelength radiation, coming to the optical collector preferably consisting of several identical mirrors. Outside each casing there are permanent magnets that create a magnetic field inside the casings to mitigate charged fraction of debris particles and provide the debris-free homocentric beams of short-wavelength radiation. Other debris mitigating techniques are additionally used. Preferably the plasma is laser-produced plasma of a liquid metal target supplied by a rotating target assembly to a focus area of a laser beam. The technical result of the invention is the creation of high-powerful high-brightness debris-free sources of short-wavelength radiation with large, preferably more than 0.25 sr, collection solid angle.</abstract><oa>free_for_read</oa></addata></record> |
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| title | SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE |
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