METHOD AND SYSTEM FOR POSITIONING AND TRANSFERRING A SAMPLE

A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Neelisetty, Krishna Kanth, Novák, Libor, Lásko, Jan, Hammerová, Veronika
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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