METHOD AND SYSTEM FOR POSITIONING AND TRANSFERRING A SAMPLE

A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS s...

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Hauptverfasser: Neelisetty, Krishna Kanth, Novák, Libor, Lásko, Jan, Hammerová, Veronika
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creator Neelisetty, Krishna Kanth
Novák, Libor
Lásko, Jan
Hammerová, Veronika
description A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title METHOD AND SYSTEM FOR POSITIONING AND TRANSFERRING A SAMPLE
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