PARTLY SEALED ION GUIDE AND ION BEAM DEPOSITION SYSTEM

Disclosed herein is an ion guide (32) for guiding an ion beam along an ion path, said ion guide (32) having a longitudinal axis (48) which corresponds to said ion path. Said ion guide (32) comprises a plurality of electrode plates (44) which are arranged perpendicularly to the longitudinal axis (48)...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAPOSI, Tobias, WALZ, Andreas, SCHLICHTING, Hartmut, BARTH, Johannes
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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