SAMPLE INSPECTION DEVICE FOR DETECTING FLUORESCENCE OF SAMPLE

A sample inspection device includes: a filter unit having a plurality of optical filters configured to transmit lights of different wavelength ranges; a light source unit configured to irradiate light to any one of the plurality of optical filters; a stage for placing a sample; a reflector oriented...

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Bibliographische Detailangaben
Hauptverfasser:	JUNG, Neon Cheol, CHO, Keunchang, DAN CHIN YU, Alexey
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	COLORIMETRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	A sample inspection device includes: a filter unit having a plurality of optical filters configured to transmit lights of different wavelength ranges; a light source unit configured to irradiate light to any one of the plurality of optical filters; a stage for placing a sample; a reflector oriented to reflect light transmitted through the one of the plurality of optical filters to the stage and to reflect light emitted from the sample on the stage to another one of the plurality of optical filters; a detection unit for detecting light emitted from the sample on the stage through light transmitted through the another one of the plurality of optical filters; an actuator for moving the filter unit; and a control unit configured to control the actuator to move the filter unit when the detection unit receives the light passing through the another one of the plurality of optical filters.