INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, SYSTEM, STORAGE MEDIUM AND PROGRAM

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, SYSTEM, STORAGE MEDIUM AND PROGRAM

An information processing apparatus acquires first defect data and second defect data generated on a basis of images imaged of an identical target, obtains a common portion that is common between the first defect data and the second defect data and a different portion that exists in either the first...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MAMIYA, Satoru, MITSUMOTO, Shinichi
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:An information processing apparatus acquires first defect data and second defect data generated on a basis of images imaged of an identical target, obtains a common portion that is common between the first defect data and the second defect data and a different portion that exists in either the first defect data or the second defect data and calculate position data corresponding to a boundary between the common portion and the different portion, and generates state change data indicating a change in a defect included in the common portion and the different portion using the position data.