THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF

The present disclosure discloses a thin-film pressure sensor and an arrangement method thereof. The thin-film pressure sensor of the present disclosure comprises a flat diaphragm and a first induction unit in the shape of a thin film arranged on the flat diaphragm, wherein the first induction unit c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN, Cui, WANG, Guoqiu, HUANG, Jian
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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