THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF

THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF

The present disclosure discloses a thin-film pressure sensor and an arrangement method thereof. The thin-film pressure sensor of the present disclosure comprises a flat diaphragm and a first induction unit in the shape of a thin film arranged on the flat diaphragm, wherein the first induction unit c...

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Hauptverfasser: CHEN, Cui, WANG, Guoqiu, HUANG, Jian
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Sprache:eng ; fre ; ger
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MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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creator CHEN, Cui
WANG, Guoqiu
HUANG, Jian
description The present disclosure discloses a thin-film pressure sensor and an arrangement method thereof. The thin-film pressure sensor of the present disclosure comprises a flat diaphragm and a first induction unit in the shape of a thin film arranged on the flat diaphragm, wherein the first induction unit comprises m rotating multi-segment resistance wires arranged around the center of a circle O of a circular deformation area of the flat diaphragm, m/2 rotating multi-segment resistance wires on one side are connected in series to form a second induction resistor R2, and m/2 rotating multi-segment resistance wires on the other side are connected in series to form a fourth induction resistor R4, where m is a multiple of 4; the arrangement method includes arrangement for the first induction unit. According to the present disclosure, the radial strain and the tangential strain of the flat diaphragm can be fully utilized, the detection sensitivity of the thin-film pressure sensor is improved, the strain difference between two sides of the rotating multi-segment resistance wires is smaller, the resistance wire is not easily twisted, the long-term stable combination of the rotating multi-segment resistance wire and the flat diaphragm is facilitated, the service life is longer, and the structure is firmer and more reliable.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP4194831A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP4194831A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP4194831A13</originalsourceid><addsrcrecordid>eNrjZDAO8fD0U3Dz9PFVCAhyDQ4ODXJVCHb1C_YPUnD0c1HwcYz0Dw1R8HUN8fB3UQjxcA1y9XfjYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxrgEmhpYmFsaGjobGRCgBAFy3Jss</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF</title><source>esp@cenet</source><creator>CHEN, Cui ; WANG, Guoqiu ; HUANG, Jian</creator><creatorcontrib>CHEN, Cui ; WANG, Guoqiu ; HUANG, Jian</creatorcontrib><description>The present disclosure discloses a thin-film pressure sensor and an arrangement method thereof. The thin-film pressure sensor of the present disclosure comprises a flat diaphragm and a first induction unit in the shape of a thin film arranged on the flat diaphragm, wherein the first induction unit comprises m rotating multi-segment resistance wires arranged around the center of a circle O of a circular deformation area of the flat diaphragm, m/2 rotating multi-segment resistance wires on one side are connected in series to form a second induction resistor R2, and m/2 rotating multi-segment resistance wires on the other side are connected in series to form a fourth induction resistor R4, where m is a multiple of 4; the arrangement method includes arrangement for the first induction unit. According to the present disclosure, the radial strain and the tangential strain of the flat diaphragm can be fully utilized, the detection sensitivity of the thin-film pressure sensor is improved, the strain difference between two sides of the rotating multi-segment resistance wires is smaller, the resistance wire is not easily twisted, the long-term stable combination of the rotating multi-segment resistance wire and the flat diaphragm is facilitated, the service life is longer, and the structure is firmer and more reliable.</description><language>eng ; fre ; ger</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; PHYSICS ; TESTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20230614&amp;DB=EPODOC&amp;CC=EP&amp;NR=4194831A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20230614&amp;DB=EPODOC&amp;CC=EP&amp;NR=4194831A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHEN, Cui</creatorcontrib><creatorcontrib>WANG, Guoqiu</creatorcontrib><creatorcontrib>HUANG, Jian</creatorcontrib><title>THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF</title><description>The present disclosure discloses a thin-film pressure sensor and an arrangement method thereof. The thin-film pressure sensor of the present disclosure comprises a flat diaphragm and a first induction unit in the shape of a thin film arranged on the flat diaphragm, wherein the first induction unit comprises m rotating multi-segment resistance wires arranged around the center of a circle O of a circular deformation area of the flat diaphragm, m/2 rotating multi-segment resistance wires on one side are connected in series to form a second induction resistor R2, and m/2 rotating multi-segment resistance wires on the other side are connected in series to form a fourth induction resistor R4, where m is a multiple of 4; the arrangement method includes arrangement for the first induction unit. According to the present disclosure, the radial strain and the tangential strain of the flat diaphragm can be fully utilized, the detection sensitivity of the thin-film pressure sensor is improved, the strain difference between two sides of the rotating multi-segment resistance wires is smaller, the resistance wire is not easily twisted, the long-term stable combination of the rotating multi-segment resistance wire and the flat diaphragm is facilitated, the service life is longer, and the structure is firmer and more reliable.</description><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDAO8fD0U3Dz9PFVCAhyDQ4ODXJVCHb1C_YPUnD0c1HwcYz0Dw1R8HUN8fB3UQjxcA1y9XfjYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxrgEmhpYmFsaGjobGRCgBAFy3Jss</recordid><startdate>20230614</startdate><enddate>20230614</enddate><creator>CHEN, Cui</creator><creator>WANG, Guoqiu</creator><creator>HUANG, Jian</creator><scope>EVB</scope></search><sort><creationdate>20230614</creationdate><title>THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF</title><author>CHEN, Cui ; WANG, Guoqiu ; HUANG, Jian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP4194831A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2023</creationdate><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHEN, Cui</creatorcontrib><creatorcontrib>WANG, Guoqiu</creatorcontrib><creatorcontrib>HUANG, Jian</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHEN, Cui</au><au>WANG, Guoqiu</au><au>HUANG, Jian</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF</title><date>2023-06-14</date><risdate>2023</risdate><abstract>The present disclosure discloses a thin-film pressure sensor and an arrangement method thereof. The thin-film pressure sensor of the present disclosure comprises a flat diaphragm and a first induction unit in the shape of a thin film arranged on the flat diaphragm, wherein the first induction unit comprises m rotating multi-segment resistance wires arranged around the center of a circle O of a circular deformation area of the flat diaphragm, m/2 rotating multi-segment resistance wires on one side are connected in series to form a second induction resistor R2, and m/2 rotating multi-segment resistance wires on the other side are connected in series to form a fourth induction resistor R4, where m is a multiple of 4; the arrangement method includes arrangement for the first induction unit. According to the present disclosure, the radial strain and the tangential strain of the flat diaphragm can be fully utilized, the detection sensitivity of the thin-film pressure sensor is improved, the strain difference between two sides of the rotating multi-segment resistance wires is smaller, the resistance wire is not easily twisted, the long-term stable combination of the rotating multi-segment resistance wire and the flat diaphragm is facilitated, the service life is longer, and the structure is firmer and more reliable.</abstract><oa>free_for_read</oa></addata></record>
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subjects MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
title THIN FILM PRESSURE SENSOR AND LAYOUT METHOD THEREOF
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-18T05%3A34%3A24IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHEN,%20Cui&rft.date=2023-06-14&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP4194831A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true