A METHOD FOR MANUFACTURING AN ELECTRICAL DEVICE WITH AN ANODIC POROUS OXIDE REGION DELIMITED BY PLANARIZING A STACK OF MATERIALS

A METHOD FOR MANUFACTURING AN ELECTRICAL DEVICE WITH AN ANODIC POROUS OXIDE REGION DELIMITED BY PLANARIZING A STACK OF MATERIALS

A method for manufacturing an electrical device comprising:- anodizing a portion of an anodizable metal layer so as to obtain an anodic porous oxide region (100) and an anodizable metal region (101) adjoining the anodic porous oxide region, the anodic porous oxide region being thicker than the anodi...

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Bibliographische Detailangaben
Hauptverfasser: EL SABAHY, Julien, VOIRON, Frédéric, SOULIER, Brigitte
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
APPARATUS THEREFOR
CHEMISTRY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
METALLURGY
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
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Beschreibung
Zusammenfassung:A method for manufacturing an electrical device comprising:- anodizing a portion of an anodizable metal layer so as to obtain an anodic porous oxide region (100) and an anodizable metal region (101) adjoining the anodic porous oxide region, the anodic porous oxide region being thicker than the anodizable metal region,- depositing a layer of liner material (105) on the anodic porous oxide region and on the anodizable metal region,- depositing a layer of filler material (106) on the layer of liner material, the filler material being different from the liner material, to obtain a stacked structure having a top surface,- planarizing the stacked structure from its top surface until reaching the layer of liner material, so as to expose a portion of liner (111) material located above at least a portion of the anodic porous oxide region (112),- removing the exposed portion of liner material.