METHOD FOR PRODUCING POLYCRYSTALLINE SILICON GRANULES

METHOD FOR PRODUCING POLYCRYSTALLINE SILICON GRANULES

Silicon granulate is produced in a fluidized bed reactor having a fluidized bed region fluidized by a gas flow and heated by a heating apparatus. Seed particles and a feed gas including hydrogen and silane and/or halosilane is continuously supplied, and elemental silicon is deposited on the seed par...

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Hauptverfasser: HERTLEIN, Harald, GOTTANKA, Michael, KÖNINGER, Benedikt
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Sprache:eng ; fre ; ger
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CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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creator HERTLEIN, Harald
GOTTANKA, Michael
KÖNINGER, Benedikt
description Silicon granulate is produced in a fluidized bed reactor having a fluidized bed region fluidized by a gas flow and heated by a heating apparatus. Seed particles and a feed gas including hydrogen and silane and/or halosilane is continuously supplied, and elemental silicon is deposited on the seed particles to form the silicon granulate, which is discharged as a continuous product stream from the reactor. The fluidized bed temperature affects the quality and formation of the product stream, which may be determined as the temperature of an offgas stream from the fluidized bend region. The temperature, as a responding variable may be determined and controlled by means of the mass and energy balance of a defined scheme.
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subjects CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
title METHOD FOR PRODUCING POLYCRYSTALLINE SILICON GRANULES
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