MICRO DIAPHRAGM PUMPING DEVICE

MICRO DIAPHRAGM PUMPING DEVICE

What is suggested is a micromembrane pumping device for pumping a fluid, having: a pump chamber to which an inlet valve, an outlet valve, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device has a plate-shaped actuator for deforming the membrane...

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Hauptverfasser: BUSSMANN, Agnes, GRÜNERBEL, Lorenz, WALD, Christian, KIBLER, Sebastian
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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creator BUSSMANN, Agnes
GRÜNERBEL, Lorenz
WALD, Christian
KIBLER, Sebastian
description What is suggested is a micromembrane pumping device for pumping a fluid, having: a pump chamber to which an inlet valve, an outlet valve, and a membrane device for varying a volume of the pump chamber are associated, wherein the membrane device has a plate-shaped actuator for deforming the membrane device; and influencing means for influencing the plate-shaped actuator and the volume of the pump chamber; wherein the membrane device has a plate-shaped membrane body limiting the pump chamber; wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber; wherein the plate-shaped actuator is mounted to and electrically insulated from the plate-shaped membrane body by an electrically insulating glue layer; wherein at least one embedded portion of a support body at or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the glue layer to detect the volume of the pump chamber; wherein the influencing means, the plate-shaped actuator and the deformation sensor form a closed-loop control circuit for regulating a volume flow.
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and influencing means for influencing the plate-shaped actuator and the volume of the pump chamber; wherein the membrane device has a plate-shaped membrane body limiting the pump chamber; wherein the plate-shaped actuator is arranged on a side of the plate-shaped membrane body facing away from the pump chamber; wherein the plate-shaped actuator is mounted to and electrically insulated from the plate-shaped membrane body by an electrically insulating glue layer; wherein at least one embedded portion of a support body at or in which a deformation sensor for detecting a deformation of the membrane device is arranged, is arranged within the glue layer to detect the volume of the pump chamber; wherein the influencing means, the plate-shaped actuator and the deformation sensor form a closed-loop control circuit for regulating a volume flow.</description><language>eng ; fre ; ger</language><subject>BLASTING ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS ; 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subjects BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
title MICRO DIAPHRAGM PUMPING DEVICE
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