GLASS WAFER AND GLASS ELEMENT FOR PRESSURE SENSORS

A glass wafer is provided that includes a sheetlike glass substrate with an opening. The sheetlike glass substrate is configured for use in a sensor selected from a group consisting of a pressure sensor, a piezoresistive sensor, a capacitive pressure sensor, and a piezoresistive pressure sensor. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PEUCHERT, Ulrich, UTZ, Thomas, BLEZINGER, Martin, LIEBSCH, Sören, JOTZ, Matthias, BREITBACH, Christian
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMISTRY GLASS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE METALLURGY MICROSTRUCTURAL TECHNOLOGY MINERAL OR SLAG WOOL PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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