OPTICAL INTERFERENCE FILTER

OPTICAL INTERFERENCE FILTER

In some implementations, an optical interference filter (200) includes a substrate (210); and a set of layers (220) that are disposed on the substrate. The set of layers includes a first subset of layers (230), wherein the first subset of layers comprises an aluminum nitride (AlN) material, and wher...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HENDRIX, Karen Denise, YANG, Jinhui, OCKENFUSS, Georg J, GRIGONIS, Marius
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:In some implementations, an optical interference filter (200) includes a substrate (210); and a set of layers (220) that are disposed on the substrate. The set of layers includes a first subset of layers (230), wherein the first subset of layers comprises an aluminum nitride (AlN) material, and wherein a stress of the first subset of layers is between -1000 and 800 megapascals; and a second subset of layers (240), wherein the second subset of layers comprises at least one other material (e.g. hydrogenated silicon).