MATERIAL COMPRISING A STACK WITH A THIN ZINC-BASED OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL

The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metallic functional layer (140) and comprising: - an underlayer of zinc-based oxide, ZnO (129), of between 0.3 and 4.4 nm; - a dielectric underlayer of tit...

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Bibliographische Detailangaben
Hauptverfasser: GUIMARD, Denis, ORVEN, Matthieu, BARRES, Thomas
Format: Patent
Sprache:eng ; fre ; ger
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