METAL-INSULATOR-METAL (MIM) ENERGY STORAGE DEVICE WITH LAYERED STACK AND MANUFACTURING METHOD

A MIM energy storage device comprising a bottom electrode; a plurality of electrically conductive vertical nanostructures; a bottom conduction-controlling layer conformally coating each nanostructure in the plurality of electrically conductive vertical nanostructures; and a layered stack of alternat...

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Bibliographische Detailangaben
Hauptverfasser: JOHANSSON, Anders, TIVERMAN, Ola, LUNDAHL, Karl, SALEEM, Muhammad Amin, BYLUND, Maria, ANDERSSON, Rickard, KABIR, M Shafiqul, MARKNÄS, Victor, DESMARIS, Vincent
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A MIM energy storage device comprising a bottom electrode; a plurality of electrically conductive vertical nanostructures; a bottom conduction-controlling layer conformally coating each nanostructure in the plurality of electrically conductive vertical nanostructures; and a layered stack of alternating conduction-controlling layers and electrode layers conformally coating the bottom conduction-controlling layer, the layered stack including at least a first odd-numbered electrode layer at a bottom of the layered stack, a first odd-numbered conduction-controlling layer directly on the first odd-numbered electrode layer, and a first even-numbered electrode layer directly on the first odd-numbered conduction-controlling layer. Each even-numbered electrode layer in the layered stack is electrically conductively connected to the bottom electrode; and each odd-numbered electrode layer in the layered stack is electrically conductively connected to any other odd-numbered electrode layer in the layered stack.