METHOD FOR MANUFACTURING A DETECTION DEVICE INCLUDING A PERIPHERAL WALL IN A MINERAL MATERIAL

The invention relates to a method for fabricating a detection device, comprising the following steps: producing thermal detectors and an encapsulating structure by way of mineral sacrificial layers; partially removing the mineral sacrificial layers, by wet chemical etching in an acid medium, so as t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YON, Jean-Jacques, DUMONT, Geoffroy
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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