MOUNTING A FLANGED VACUUM PUMP TO A VACUUM SYSTEM

A vacuum pump comprises an inlet flange for connecting to a vacuum chamber, where the inlet flange comprises a plurality of apertures for receiving a plurality of protruding fixing elements extending from the vacuum chamber. The protruding fixing elements comprise an enlarged retaining portion at an...

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Bibliographische Detailangaben
Hauptverfasser: TISCHLER, Sean David, ASHE, Willie, LE MON, Gregory Ryan, LAYNG, Brian Matthew
Format: Patent
Sprache:eng ; fre ; ger
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