PRESSURE SENSOR

A pressure sensing apparatus comprises an elongate first sensor device in a beam configuration supported at at least one longitudinal end by a rigid support structure and having a deflectable portion. A chamber is disposed adjacent a first, internally-facing, face of the first sensor device. An enve...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZOU, Longfang, BAHMANYAR, Muhammad Reza
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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