METHOD AND SYSTEM FOR DETERMINING SAMPLE COMPOSITION FROM SPECTRAL DATA BY RETRAINING A NEURAL NETWORK

Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching wi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MACHEK, Ondrej, KAPLENKO, Mykola, KAPLENKO, Oleksii, KLUSACEK, Jan, TUMA, Tomá
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!