MEASURING DEVICE FOR INTERFEROMETRIC SHAPE MEASUREMENT

A measuring device (10) for the interferometric shape measurement of a surface (12) of a test object (14-1; 14-2)includes (i) a diffractive optical element (26-1; 26-2) that generates a test wave (28) from incoming measurement radiation (18), wherein the diffractive optical element radiates the test...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HETZLER, Jochen
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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