TECHNOLOGIES FOR SILICON DIFFRACTION GRATINGS

Diffraction grating and method for manufacturing it. The diffraction grating has ridges of thickness of at least 1 micron and is made on a silicon substrate. It can further comprise: an anti-reflection coating on the ridges and on the other side of the substrate, an etch-stop layer between the subst...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FRISH, Harel, APPLETON, Randal, FRIEDMAN, Ron, PETRONIUS, Israel, JOHNSON, Kenneth
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ANALOGOUS ARRANGEMENTS USING OTHER WAVES DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIO DIRECTION-FINDING RADIO NAVIGATION TESTING
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