ELECTROMECHANICAL MICROSYSTEM

An electromechanical microsystem including an electromechanical transducer, a deformable diaphragm and a cavity hermetically containing a deformable medium keeping a constant volume under the action of an external pressure change. The deformable diaphragm forms a wall of the cavity and has at least...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAINT-PATRICE, Damien, NICOLAS, Stéphane, MOLLARD, Laurent
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
Online-Zugang:	Volltext bestellen
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