COATING EQUIPMENT
Provided by the present invention is a coating equipment. The coating equipment comprises a reaction cavity body, a gas supply part, a vacuum pumping apparatus, a pulse power supply and a radio frequency power supply, wherein the reaction cavity body has a reaction cavity, the gas supply part is use...
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| creator | SHAN, Wei ZONG, Jian HAN, Hui LAN, Zhuyao |
| description | Provided by the present invention is a coating equipment. The coating equipment comprises a reaction cavity body, a gas supply part, a vacuum pumping apparatus, a pulse power supply and a radio frequency power supply, wherein the reaction cavity body has a reaction cavity, the gas supply part is used to supply gas to the reaction cavity, the vacuum pumping apparatus is connected with the reaction cavity body in a manner capable of communication with the reaction cavity, the pulse power supply is used to provide the reaction cavity body with a pulsed electric field, and the radio frequency power supply is used to provide the reaction cavity body with a radio frequency electric field. A plurality of coated workpieces are held in the reaction cavity, and when the pulse power supply and the radio frequency power supply are connected, the gas in the reaction cavity body is ionized under the action of the radio frequency electric field and the pulsed electric field to generate plasma, and the plasma is deposited to the surface of workpieces to be coated. |
| format | Patent |
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The coating equipment comprises a reaction cavity body, a gas supply part, a vacuum pumping apparatus, a pulse power supply and a radio frequency power supply, wherein the reaction cavity body has a reaction cavity, the gas supply part is used to supply gas to the reaction cavity, the vacuum pumping apparatus is connected with the reaction cavity body in a manner capable of communication with the reaction cavity, the pulse power supply is used to provide the reaction cavity body with a pulsed electric field, and the radio frequency power supply is used to provide the reaction cavity body with a radio frequency electric field. A plurality of coated workpieces are held in the reaction cavity, and when the pulse power supply and the radio frequency power supply are connected, the gas in the reaction cavity body is ionized under the action of the radio frequency electric field and the pulsed electric field to generate plasma, and the plasma is deposited to the surface of workpieces to be coated.</description><language>eng ; fre ; ger</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221012&DB=EPODOC&CC=EP&NR=4071269A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25568,76551</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20221012&DB=EPODOC&CC=EP&NR=4071269A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SHAN, Wei</creatorcontrib><creatorcontrib>ZONG, Jian</creatorcontrib><creatorcontrib>HAN, Hui</creatorcontrib><creatorcontrib>LAN, Zhuyao</creatorcontrib><title>COATING EQUIPMENT</title><description>Provided by the present invention is a coating equipment. The coating equipment comprises a reaction cavity body, a gas supply part, a vacuum pumping apparatus, a pulse power supply and a radio frequency power supply, wherein the reaction cavity body has a reaction cavity, the gas supply part is used to supply gas to the reaction cavity, the vacuum pumping apparatus is connected with the reaction cavity body in a manner capable of communication with the reaction cavity, the pulse power supply is used to provide the reaction cavity body with a pulsed electric field, and the radio frequency power supply is used to provide the reaction cavity body with a radio frequency electric field. A plurality of coated workpieces are held in the reaction cavity, and when the pulse power supply and the radio frequency power supply are connected, the gas in the reaction cavity body is ionized under the action of the radio frequency electric field and the pulsed electric field to generate plasma, and the plasma is deposited to the surface of workpieces to be coated.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBB09ncM8fRzV3ANDPUM8HX1C-FhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGuASYG5oZGZpaOhsZEKAEA7f0ddw</recordid><startdate>20221012</startdate><enddate>20221012</enddate><creator>SHAN, Wei</creator><creator>ZONG, Jian</creator><creator>HAN, Hui</creator><creator>LAN, Zhuyao</creator><scope>EVB</scope></search><sort><creationdate>20221012</creationdate><title>COATING EQUIPMENT</title><author>SHAN, Wei ; ZONG, Jian ; HAN, Hui ; LAN, Zhuyao</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP4071269A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2022</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>SHAN, Wei</creatorcontrib><creatorcontrib>ZONG, Jian</creatorcontrib><creatorcontrib>HAN, Hui</creatorcontrib><creatorcontrib>LAN, Zhuyao</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SHAN, Wei</au><au>ZONG, Jian</au><au>HAN, Hui</au><au>LAN, Zhuyao</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>COATING EQUIPMENT</title><date>2022-10-12</date><risdate>2022</risdate><abstract>Provided by the present invention is a coating equipment. The coating equipment comprises a reaction cavity body, a gas supply part, a vacuum pumping apparatus, a pulse power supply and a radio frequency power supply, wherein the reaction cavity body has a reaction cavity, the gas supply part is used to supply gas to the reaction cavity, the vacuum pumping apparatus is connected with the reaction cavity body in a manner capable of communication with the reaction cavity, the pulse power supply is used to provide the reaction cavity body with a pulsed electric field, and the radio frequency power supply is used to provide the reaction cavity body with a radio frequency electric field. A plurality of coated workpieces are held in the reaction cavity, and when the pulse power supply and the radio frequency power supply are connected, the gas in the reaction cavity body is ionized under the action of the radio frequency electric field and the pulsed electric field to generate plasma, and the plasma is deposited to the surface of workpieces to be coated.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | COATING EQUIPMENT |
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