LOW FORMING VOLTAGE OXRAM MEMORY CELL, AND ASSOCIATED METHOD OF MANUFACTURE

An OxRAM resistive memory cell includes a lower electrode, an upper electrode, and an active layer which extends between the lower electrode and the upper electrode. The active layer includes a layer of a first electrically insulating oxide, wherein an electrically conductive filament can be formed,...

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Hauptverfasser: MOLAS, Gabriel, MAGIS, Thomas, COHEN, Yifat, NODIN, Jean-François, BRICALLI, Alessandro, REGEV, Amir, PICCOLBONI, Guiseppe
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creator MOLAS, Gabriel
MAGIS, Thomas
COHEN, Yifat
NODIN, Jean-François
BRICALLI, Alessandro
REGEV, Amir
PICCOLBONI, Guiseppe
description An OxRAM resistive memory cell includes a lower electrode, an upper electrode, and an active layer which extends between the lower electrode and the upper electrode. The active layer includes a layer of a first electrically insulating oxide, wherein an electrically conductive filament can be formed, then subsequently broken and reformed several times successively. The upper electrode includes a reservoir layer, capable of receiving oxygen, which includes an upper part made of a metal and a lower part made of a second oxide, the second oxide being an oxide of the metal and including a proportion of oxygen such that the second oxide is electrically conductive.
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title LOW FORMING VOLTAGE OXRAM MEMORY CELL, AND ASSOCIATED METHOD OF MANUFACTURE
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