OPTICAL MICROPHONE SUBSTRATE

An optical microphone assembly including a substrate having a first and second substrate portions with the first substrate portion being thinner than the second substrate portion, an interferometic arrangement including a membrane and at least one optical element including a surface of the first sub...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VENNERØD, Jakob, SAGBERG, Håkon
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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