PELLICLE FILM, PELLICLE, CARBON NANOTUBE WEB AND MANUFACTURING METHOD THEREFOR, CARBON NANOTUBE FILM, AND CARBON NANOTUBE THREAD AND MANUFACTURING METHOD THEREFOR

There is provided a technique that can achieve a pellicle film made of carbon nanotubes and having high in-plane transmittance uniformity. The pellicle film (12) contains a plurality of first carbon nanotubes (1200a) extending in a first direction (D1) and arrayed in the radial direction, and a plur...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KODERA, Yutaka, SEKI, Kazunori, TAKADA, Naoya
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:There is provided a technique that can achieve a pellicle film made of carbon nanotubes and having high in-plane transmittance uniformity. The pellicle film (12) contains a plurality of first carbon nanotubes (1200a) extending in a first direction (D1) and arrayed in the radial direction, and a plurality of second carbon nanotubes (1200b) extending in a second direction (D2) intersecting the first direction (D1), and arrayed in their radial direction.