PELLICLE FILM, PELLICLE, CARBON NANOTUBE WEB AND MANUFACTURING METHOD THEREFOR, CARBON NANOTUBE FILM, AND CARBON NANOTUBE THREAD AND MANUFACTURING METHOD THEREFOR
There is provided a technique that can achieve a pellicle film made of carbon nanotubes and having high in-plane transmittance uniformity. The pellicle film (12) contains a plurality of first carbon nanotubes (1200a) extending in a first direction (D1) and arrayed in the radial direction, and a plur...
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Zusammenfassung: | There is provided a technique that can achieve a pellicle film made of carbon nanotubes and having high in-plane transmittance uniformity. The pellicle film (12) contains a plurality of first carbon nanotubes (1200a) extending in a first direction (D1) and arrayed in the radial direction, and a plurality of second carbon nanotubes (1200b) extending in a second direction (D2) intersecting the first direction (D1), and arrayed in their radial direction. |
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