CHARGED PARTICLE MICROSCOPE SYSTEMS AND CLUSTERING PROCESSES FOR HIGH DYNAMIC RANGE SAMPLE ANALYSIS

Methods and systems for high dynamic range (HDR) charged particle analysis using clustering processes include accessing a plurality of instances of image data for a region of a sample, where each instance of image data was captured with different parameters by a charged particle microscope. The diff...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Levien, Cody, Howell, Garth, Tuma, Tomás, Owen, Michael
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!