ELECTROSTATIC PUCK AND METHOD OF MANUFACTURE

A method of constructing an E-puck includes forming at least one trench into a lower substrate, depositing an electrode material onto the lower substrate and into the at least one trench, removing excess electrode material from the lower substrate to leave the electrode material within the at least...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MARGAVIO, Patrick, PTASIENSKI, Kevin, ENGLISH, Kurt
Format: Patent
Sprache:eng ; fre ; ger
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