EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS

An edge ring system for a substrate processing system includes a top edge ring including an annular body having an inner diameter and an outer diameter. The outer diameter of the top edge ring is smaller than a horizontal opening of a substrate port of the substrate processing system. A first edge r...

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Bibliographische Detailangaben

Hauptverfasser:	HAN, Hui Ling, HUANG, Xinwei, ERICKSON, Ann, WU, Joanna, PEREZ, Aris, KIMBALL, Christopher, PATERSON, Alexander Miller, RAMACHANDRAN, Seetharaman, SRIRAMAN, Saravanapriyan
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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