ARRANGEMENT FOR MONITORING LASER STRUCTURING PROCESSES WHICH ARE CARRIED OUT ON SURFACES OF COMPONENTS

The arrangement for monitoring laser structuring processes which are carried out on surfaces of components is provided with an arrangement of optical elements (9), which arrangement is designed such that a laser beam (2) emitted by a laser radiation source is split into at least two partial beams (1) and the partial beams (1) are directed onto the surface such that, owing to the interference of the at least two partial beams, a locally defined structure on the particular surface of the component (3) is formed having predefinable structural periods Ʌ. An optical detector (4), which is designed for spatially resolved capturing of intensities of laser radiation (5) reflected by the component surface to be structured or an already partially structured component surface, or laser radiation (6) reflected and refracted by the already at least partially structured component surface, is a component of the arrangement of optical elements. The detector (4) is connected to an electronic evaluation and control unit that is designed to control the process of the direct laser interference structuring on the basis of the intensities captured in a spatially resolved manner.