INFORMATION PROCESSING APPARATUS, LEARNING DEVICE, INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, PROGRAM, AND NON-TRANSITORY STORAGE MEDIUM

An information processing apparatus including a calculator 51 configured to calculate orientation information 43 based on a Talbot image 42 of a sample, a structure analyzer 52 configured to perform structural analysis of the sample based on the calculated orientation information 43, and an output 2...

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Bibliographische Detailangaben
Hauptverfasser: EGUCHI, Yoshihiko, OTA, Ikuma
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An information processing apparatus including a calculator 51 configured to calculate orientation information 43 based on a Talbot image 42 of a sample, a structure analyzer 52 configured to perform structural analysis of the sample based on the calculated orientation information 43, and an output 28 configured to output a result of the structural analysis. The information processing apparatus may further include a learning device 53 configured to perform part of a process of structural analysis using machine learning. The learning device 53 may include a first learning unit 53a that undergoes learning by associating sample manufacture information 41 of samples with Talbot images 42. The learning device 53 may include a second learning unit 53b that undergoes learning by associating sample manufacture information 41 of samples with orientation information 43.