MEMS BASED LIGHT DEFLECTING DEVICE AND METHOD

Some embodiments are directed to a system comprising a MEMS based actuator unit and a control electric circuit. The actuator unit comprising one or more MEMS actuators, each comprising a stator and a rotor and configured to define a payload position in response to electric potential between said sta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GREENBERG, Boris, ZIMMERMAN, Yaron, BRONFMAN, Arkady, MARJIEH, Fares, EFRATI, Shlomi, KOFMAN, Semion
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING ELECTRIC VARIABLES MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING MAGNETIC VARIABLES OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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