SETTING TEMPERATURE CALCULATION DEVICE, LOW TEMPERATURE PROCESSING SYSTEM, SETTING TEMPERATURE CALCULATION METHOD, AND SETTING TEMPERATURE CALCULATION PROGRAM
A set temperature calculating apparatus, a low temperature treatment system, a set temperature calculating method, and a set temperature calculating program are provided for realizing a low temperature treatment. The set temperature calculating apparatus includes: a first obtaining unit configured t...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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