SETTING TEMPERATURE CALCULATION DEVICE, LOW TEMPERATURE PROCESSING SYSTEM, SETTING TEMPERATURE CALCULATION METHOD, AND SETTING TEMPERATURE CALCULATION PROGRAM

A set temperature calculating apparatus, a low temperature treatment system, a set temperature calculating method, and a set temperature calculating program are provided for realizing a low temperature treatment. The set temperature calculating apparatus includes: a first obtaining unit configured t...

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Bibliographische Detailangaben
1. Verfasser: SATOU, Kiichirou
Format: Patent
Sprache:eng ; fre ; ger
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