LAMINATED PIEZOELECTRIC DEVICE, AND A METHOD FOR MANUFACTURING THE PIEZOELECTRIC DEVICE
The occurrence of cracking in a functional layer is suppressed, while maintaining flexibility of a layered structure. The layered structure includes a polymer substrate, and a crystalline functional layer formed on the first surface of the substrate. The surface roughness of the first surface of the...
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| creator | NAGAOKA, Naoki ISHIKAWA, Taketo NAKAMURA, Daisuke MACHINAGA, Hironobu KUROSE, Manami |
| description | The occurrence of cracking in a functional layer is suppressed, while maintaining flexibility of a layered structure. The layered structure includes a polymer substrate, and a crystalline functional layer formed on the first surface of the substrate. The surface roughness of the first surface of the substrate is 3 nm or less in terms of arithmetic mean roughness (Ra). |
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| language | eng ; fre ; ger |
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| subjects | ELECTRICITY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM PERFORMING OPERATIONS TRANSPORTING |
| title | LAMINATED PIEZOELECTRIC DEVICE, AND A METHOD FOR MANUFACTURING THE PIEZOELECTRIC DEVICE |
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