MACROSCOPIC TEXTURING FOR ANODIZED AND COATED SURFACES

A consumable part for a plasma processing chamber includes a plasma facing side. An engineered surface is formed into the plasma facing side of the consumable part. A plurality of raised features defines the engineered surface, wherein features are arranged in a predefined pattern, wherein each of t...

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Bibliographische Detailangaben
Hauptverfasser: RAJAGOPALAN, Mansa, JIANG, Yu, LONDONO, Nicolas, PENG, Gordon Wen-Yin, RADOCEA, Adrian
Format: Patent
Sprache:eng ; fre ; ger
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