METHOD OF AND ARRANGEMENT FOR MAPPING STRUCTURAL FEATURES ON A SURFACE OF A SAMPLE BY SCANNING PROBE MICROSCOPY

The present document relates to a method of mapping structural features on a surface of a sample using a scanning probe microscopy device comprising a sample support structure for supporting the sample, a scan head including a probe comprising a cantilever and a probe tip arranged on the cantilever,...

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1. Verfasser:	SADEGHIAN MARNANI, Hamed
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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creator	SADEGHIAN MARNANI, Hamed
description	The present document relates to a method of mapping structural features on a surface of a sample using a scanning probe microscopy device comprising a sample support structure for supporting the sample, a scan head including a probe comprising a cantilever and a probe tip arranged on the cantilever, and an actuator for moving the probe tip relative to the sample surface for performing the mapping. The method comprises scanning the probe tip relative to the sample surface in a measurement area, wherein the probing tip is brought in contact with the sample; and determining, at least one of: a position of the probe tip relative to the surface in a direction perpendicular thereto, or an orientation of the probe tip relative to the surface. Prior to scanning, the method comprises applying a cover material to at least the measurement area to form a cover layer having a flat surface, and hardening the cover layer. The document further relates to a scanning probe microscopy arrangement.
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The method comprises scanning the probe tip relative to the sample surface in a measurement area, wherein the probing tip is brought in contact with the sample; and determining, at least one of: a position of the probe tip relative to the surface in a direction perpendicular thereto, or an orientation of the probe tip relative to the surface. Prior to scanning, the method comprises applying a cover material to at least the measurement area to form a cover layer having a flat surface, and hardening the cover layer. 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The method comprises scanning the probe tip relative to the sample surface in a measurement area, wherein the probing tip is brought in contact with the sample; and determining, at least one of: a position of the probe tip relative to the surface in a direction perpendicular thereto, or an orientation of the probe tip relative to the surface. Prior to scanning, the method comprises applying a cover material to at least the measurement area to form a cover layer having a flat surface, and hardening the cover layer. 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language	eng ; fre ; ger
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subjects	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
title	METHOD OF AND ARRANGEMENT FOR MAPPING STRUCTURAL FEATURES ON A SURFACE OF A SAMPLE BY SCANNING PROBE MICROSCOPY
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