COMPOSITE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF

COMPOSITE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF

A piezoelectric composite substrate for SAW devices with small loss is provided. A composite substrate (1) for a surface acoustic wave device according to one embodiment of the present invention has a piezoelectric single crystal thin film (2), a support substrate (3), and a first intervening layer...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: AKIYAMA, Shoji, TANNO, Masayuki
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator AKIYAMA, Shoji
TANNO, Masayuki
description A piezoelectric composite substrate for SAW devices with small loss is provided. A composite substrate (1) for a surface acoustic wave device according to one embodiment of the present invention has a piezoelectric single crystal thin film (2), a support substrate (3), and a first intervening layer (4) between the piezoelectric single crystal thin film and the support substrate. In said composite substrate, the first intervening layer is in contact with the piezoelectric single crystal thin film, and the acoustic velocity of the transverse wave in the first intervening layer is faster than the acoustic velocity of the fast transverse wave in the piezoelectric single crystal thin film.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP3920417A2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP3920417A2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP3920417A23</originalsourceid><addsrcrecordid>eNqNikEKwjAQRbNxIeod5gKCtoK4jMnEZJFMSSZ1WYrElWih3h8jeABX77_PW4qsyHeUHCOkfE4cZV2GYrVopEKQinJip-AqewSNvfueQYOXIdeCc3ThAh7Zkga2GJHMWizu42Mumx9XAgyystsyvYYyT-OtPMt7wK49NbvD_iib9o_kAx4FMC0</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>COMPOSITE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF</title><source>esp@cenet</source><creator>AKIYAMA, Shoji ; TANNO, Masayuki</creator><creatorcontrib>AKIYAMA, Shoji ; TANNO, Masayuki</creatorcontrib><description>A piezoelectric composite substrate for SAW devices with small loss is provided. A composite substrate (1) for a surface acoustic wave device according to one embodiment of the present invention has a piezoelectric single crystal thin film (2), a support substrate (3), and a first intervening layer (4) between the piezoelectric single crystal thin film and the support substrate. In said composite substrate, the first intervening layer is in contact with the piezoelectric single crystal thin film, and the acoustic velocity of the transverse wave in the first intervening layer is faster than the acoustic velocity of the fast transverse wave in the piezoelectric single crystal thin film.</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRONIC CIRCUITRY ; ELECTRICITY ; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS ; RESONATORS</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211208&amp;DB=EPODOC&amp;CC=EP&amp;NR=3920417A2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211208&amp;DB=EPODOC&amp;CC=EP&amp;NR=3920417A2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>AKIYAMA, Shoji</creatorcontrib><creatorcontrib>TANNO, Masayuki</creatorcontrib><title>COMPOSITE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF</title><description>A piezoelectric composite substrate for SAW devices with small loss is provided. A composite substrate (1) for a surface acoustic wave device according to one embodiment of the present invention has a piezoelectric single crystal thin film (2), a support substrate (3), and a first intervening layer (4) between the piezoelectric single crystal thin film and the support substrate. In said composite substrate, the first intervening layer is in contact with the piezoelectric single crystal thin film, and the acoustic velocity of the transverse wave in the first intervening layer is faster than the acoustic velocity of the fast transverse wave in the piezoelectric single crystal thin film.</description><subject>BASIC ELECTRONIC CIRCUITRY</subject><subject>ELECTRICITY</subject><subject>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</subject><subject>RESONATORS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNikEKwjAQRbNxIeod5gKCtoK4jMnEZJFMSSZ1WYrElWih3h8jeABX77_PW4qsyHeUHCOkfE4cZV2GYrVopEKQinJip-AqewSNvfueQYOXIdeCc3ThAh7Zkga2GJHMWizu42Mumx9XAgyystsyvYYyT-OtPMt7wK49NbvD_iib9o_kAx4FMC0</recordid><startdate>20211208</startdate><enddate>20211208</enddate><creator>AKIYAMA, Shoji</creator><creator>TANNO, Masayuki</creator><scope>EVB</scope></search><sort><creationdate>20211208</creationdate><title>COMPOSITE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF</title><author>AKIYAMA, Shoji ; TANNO, Masayuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3920417A23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2021</creationdate><topic>BASIC ELECTRONIC CIRCUITRY</topic><topic>ELECTRICITY</topic><topic>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</topic><topic>RESONATORS</topic><toplevel>online_resources</toplevel><creatorcontrib>AKIYAMA, Shoji</creatorcontrib><creatorcontrib>TANNO, Masayuki</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>AKIYAMA, Shoji</au><au>TANNO, Masayuki</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>COMPOSITE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF</title><date>2021-12-08</date><risdate>2021</risdate><abstract>A piezoelectric composite substrate for SAW devices with small loss is provided. A composite substrate (1) for a surface acoustic wave device according to one embodiment of the present invention has a piezoelectric single crystal thin film (2), a support substrate (3), and a first intervening layer (4) between the piezoelectric single crystal thin film and the support substrate. In said composite substrate, the first intervening layer is in contact with the piezoelectric single crystal thin film, and the acoustic velocity of the transverse wave in the first intervening layer is faster than the acoustic velocity of the fast transverse wave in the piezoelectric single crystal thin film.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng ; fre ; ger
recordid cdi_epo_espacenet_EP3920417A2
source esp@cenet
subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title COMPOSITE SUBSTRATE FOR SURFACE ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-31T12%3A39%3A01IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=AKIYAMA,%20Shoji&rft.date=2021-12-08&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP3920417A2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true